15 research outputs found
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Preparation by pulsed vacuum arc deposition and characterization of DLC/MoS2 nanocomposite thin films
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Preparation by pulsed vacuum arc deposition and characterization of DLC/MoS2 nanocomposite thin films
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Preparation of SI{sub x}C{sub y}H{sub z} Films from Methylsilane by Plasma Enhanced Chemical Vapor Deposition
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Preparation of SI{sub x}C{sub y}H{sub z} Films from Methylsilane by Plasma Enhanced Chemical Vapor Deposition
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Correlation between Microstructure and Mechanical Properties of TiC Films Produced by Vacuum arc Deposition and Reactive Magnetron Sputtering
We have studied the synthesis of TiC films by vacuum arc deposition and reactive magnetron sputtering over a wide range of compositions. The films were deposited on silicon and tool steel. The films were characterized by various techniques: Auger electron and X-ray photoelectron spectroscopies, Rutherford backscattering, transmission electron diffraction and X-ray diffraction. Mechanical properties such as stress, adhesion, friction coefficient and wear resistance were obtained by carrying measurements of the curvature of the silicon substrate, pull tests, and ball-on-disk tests, respectively